IOP Conference Series Materials Science and Engineering · 2012 · 13 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationThin FilmsFerroelectric CeramicsOxide SemiconductorsPiezoelectric CeramicsPiezoelectric MaterialsSilicon MaterialsThin-film MaterialsBuffer LayersEpitaxial Thin FilmsPiezoelectric Thin FilmsPulsed Laser DepositionSiliconSilicon Thin FilmsThin Oxide LayersThin-film Piezoelectrics
International audience
12
Ian M. Reaney, Keith G. Brooks, Radosveta D. Klissurska et al. · Journal of the American Ceramic Society · 1994 · 144 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +15
Paolo Perna, Laurence Méchin, M. P. Chauvat et al. · Journal of Physics Condensed Matter · 2009 · 43 citations
Natural Sciences, Materials Engineering, Materials Science +17