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Defect reduction and surface passivation of SiO 2 /Si by heat treatment with high-pressure H 2 O vapor
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1999
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Sio 2Electrical EngineeringEngineeringSurface ScienceApplied PhysicsDefect ReductionSiliceneSemiconductor Device FabricationSilicon On InsulatorHeat TreatmentChemical Vapor DepositionSilicon Debugging
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