Concepedia

High deposition rate of epitaxial (100) Iridium film on (100)YSZ/(100)Si substrate by RF sputtering deposition

Tran Dang Khoa, Sadayoshi Horii, Susumu Horita

Thin Solid Films · 2002 · 23 citations · 14 references

DOI

Concepts

References

14

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Single-crystal Pb(ZrxTi1−x)O3 thin films prepared by metal-organic chemical vapor deposition: Systematic compositional variation of electronic and optical properties

C. M. Foster, G. R. Bai, R. Csencsits et al. · Journal of Applied Physics · 1997 · 279 citations

, , +17

A new solid state memory resistor

J.L. Moll, Yasuo Tarui · IEEE Transactions on Electron Devices · 1963 · 268 citations

, , +10

Energetic binary collisions in rare gas plasmas

R. S. Robinson · Journal of Vacuum Science and Technology · 1979 · 156 citations

, , +14

Monte Carlo calculation of the thermalization of atoms sputtered from the cathode of a sputtering discharge

G. M. Turner, I. S. Falconer, B. W. James et al. · Journal of Applied Physics · 1989 · 136 citations

, , +16