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High deposition rate of epitaxial (100) Iridium film on (100)YSZ/(100)Si substrate by RF sputtering deposition

Materials ScienceMaterials EngineeringSi SubstrateEpitaxial GrowthEngineeringIridium FilmApplied PhysicsChemical DepositionPulsed Laser DepositionMolecular Beam EpitaxyHigh Deposition RateOptoelectronicsChemical Vapor Deposition