Concepedia

Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurements

H. Kuttner, G. Urban, A. Jachimowicz, F. Köhl, F. Olcaytug, P. Goiser

Sensors and Actuators A Physical · 1991 · 24 citations · 3 references

DOI

Concepts

References

3

High-resolution thin-film temperature sensor arrays for medical applications

G. Urban, A. Jachimowicz, F. Köhl et al. · Sensors and Actuators A Physical · 1990 · 57 citations

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A low temperature process for the reactive formation of Si3N4 layers on InSb

F. Olcaytug, K. Riedling, W. Fallmann · Thin Solid Films · 1980 · 15 citations

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Preparation and dielectric properties of Si3N4 thin films

G. Rieder, F. Olcaytug · Thin Solid Films · 1982 · 12 citations

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