Non-ideal effects improvement of SF6 plasma treated hafnium oxide film based on electrolyte–insulator–semiconductor structure for pH-sensor application - Concepedia

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Non-ideal effects improvement of SF6 plasma treated hafnium oxide film based on electrolyte–insulator–semiconductor structure for pH-sensor application

21

Citations

16

References

2010

Year

Tseng-Fu Lu, Jer‐Chyi Wang, Chia‐Ming Yang, Chung-Po Chang, Kuan‐I Ho, Chi‐Fong Ai, Chao‐Sung Lai

Microelectronics Reliability

Chemical EngineeringElectrical EngineeringEngineeringSf6 PlasmaHafnium Oxide FilmChemistryNon-ideal Effects ImprovementElectrochemistry

References

	Year	Citations

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