Surface Preparation and Characterization Techniques for Quartz Resonators

Abstract

Abstract : CHNIQUES. The polishing processes which to date produced the most defect-free surfaces are described. The surface crystallinities were investigated by high energy electron diffraction (HEED). Clearly defined Kikuchi lines were observed indicating that if there is a disturbed surface layer, its thickness is less than 100A. The effectiveness of the hydrogen peroxide based cleaning procedure was investigated by Auger electron spectroscopy. A fraction of a monolayer of carbon was the only observable contaminant on the surface after this procedure was used. Atomically clean quartz surfaces could be produced by ion bombardment cleaning, but the ion bombardment itself produced some undesired side effects. The effects of the electron beam and of the ion beam are discussed. (Modified author abstract)