Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting

Dongna Shen, Jung‐Hyun Park, Joo Hyon Noh, Song-Yul Choe, Seung‐Hyun Kim, Howard Clyde Wikle, Dong‐Joo Kim

Sensors and Actuators A Physical · 2009 · 256 citations · 12 references

Concepts

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