Concepedia
Surface and Coatings Technology · 1998 · 11 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsChemical Vapor DepositionCoating TechnologyCoatingsPhysical Vapor DepositionThin-film DepositionAluminum Nitride
6
The low temperature catalyzed chemical vapor deposition and characterization of aluminum nitride thin films
Jeffrey L. Dupuie, Erdoḡan Gülari · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 66 citations
Natural Sciences, Materials Engineering, Materials Science +17
Chemical vapor deposition of aluminum nitride thin films
Roy G. Gordon, Umar Riaz, David M. Hoffman · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 40 citations
Natural Sciences, Materials Engineering, Materials Science +14
Low-Temperature Synthesis of Aluminium Nitride Film by HCD-Type Ion Plating
Matsuo Kishi, Mizuaki Suzuki Mizuaki Suzuki, Kenichi Ogawa · Japanese Journal of Applied Physics · 1992 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +16
The growth mechanism of 〈100〉 oriented AlN thin films by low-frequency plasma-enhanced metalorganic chemical vapour deposition process
G.Y. Meng, Nathalie Azéma, B. Cros et al. · Journal of Crystal Growth · 1993 · 19 citations
The deposition of aluminum nitride on silicon by plasma-enhanced metal-organic chemical vapour deposition
Th. Stauden, G. Eichhorn, V. Cimalla et al. · Diamond and Related Materials · 1996 · 11 citations