Conductive Carbon Nanotube Composite Microprobes

Abstract

A simple, flexible, and robust way of fabricating fully functional electromechanical carbon nanotube (CNT) microprobes, by transferring as-grown CNT columns onto a conductive substrate using a conductive epoxy (see figure), is shown. The CNT microprobes are approximately 500 times stronger than as-grown pillars and can perform up to 200 cycles without degradation in electrical or mechanical properties.