Publication | Closed Access
Thermochemical dry etching of single crystal ferrite by laser irradiation in CCl4 gas atmosphere
34
Citations
10
References
1988
Year
Materials ScienceThermochemical Dry EtchingEngineeringOptical PropertiesCcl4 Gas AtmosphereSingle Crystal FerriteApplied PhysicsLaser ApplicationsLaser MaterialLaser-assisted DepositionPulsed Laser DepositionPlasma EtchingHigh-power Lasers
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