Concepedia

Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling

Lars Pastewka, Roland Salzer, Andreas Graff, Frank Altmann, Michael Moseler

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2009 · 52 citations · 23 references

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References

23

Computer Simulation of Liquids

S. P, K. J · Journal of Molecular Liquids · 1988 · 15.9K citations

, , +12

Empirical interatomic potential for silicon with improved elastic properties

J. Tersoff · Physical review. B, Condensed matter · 1988 · 1.6K citations

, , +9

Defect production in collision cascades in elemental semiconductors and fcc metals

K. Nordlund, M. Ghaly, R. S. Averback et al. · Physical review. B, Condensed matter · 1998 · 915 citations

, , +16

TEM Sample Preparation and FIB-Induced Damage

Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino et al. · MRS Bulletin · 2007 · 873 citations · Full text

, , +6

Generalized Langevin equation approach for atom/solid-surface scattering: General formulation for classical scattering off harmonic solids

S. A. Adelman, J. D. Doll · The Journal of Chemical Physics · 1976 · 824 citations

, , +15