Publication | Closed Access
Al-related recombination center in polycrystalline Si
27
Citations
5
References
1987
Year
Materials ScienceMaterials EngineeringElectrical EngineeringDeep-level Transient SpectroscopyEngineeringIon ImplantationPhysicsNanoelectronicsAl-related Recombination CenterApplied PhysicsPolycrystalline SiliconSemiconductor Device FabricationAluminum-related TrapsSilicon On InsulatorMicroelectronicsOptoelectronicsSilicon Debugging
Aluminum-related traps in polycrystalline silicon are investigated by deep-level transient spectroscopy and laser-beam-induced current measurements. One of these traps is found to be responsible for electron recombination.
| Year | Citations | |
|---|---|---|
Page 1
Page 1