Surface morphology of TiN films reactively deposited by bias sputtering

Bias Effect on the Microstructure and Diffusion Barrier Capability of Sputtered TiN and TiO_xN_y Films

Ping Jin Ping Jin, Shigeo Maruno · Japanese Journal of Applied Physics · 1992 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +17

Highly adhesive TiN thin films prepared on glass by the electron shower method

Hisami Yumoto, Kenji KANEKO, Masatou Ishihara et al. · Thin Solid Films · 1996 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +12

Effect of surface roughness on magnetic properties of Fe films deposited by dual ion beam sputtering

S. Iwatsubo, T. Takahashi, Masuda Nao · Thin Solid Films · 1999 · 13 citations

Natural Sciences, Materials Science, Physics +17