Effects of deposition temperature on Parylene-C properties

Abstract

This paper reports the study of in-situ deposition temperature (ranging from 20°C to 80°C) effects on Parylene-C properties in terms of glass transition temperature (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</sub> ), β-relaxation temperature (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">β</sub> ), Young's modulus and crystallinity (including crystallite size). The results show that the Parylene-C (PA-C) thin film deposited at higher deposition temperature exhibits higher T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">g</sub> and T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">β</sub> , revealing that the movement of the molecular backbones is further frozen and restricted. It is physically consistent with the data showing that higher deposition temperature induces greater degree of crystallinity and larger Young's modulus. With the new knowledge, Parylene-C thin film with properties tailored to various requirements could be achieved by choosing the proper deposition temperature.