Capillary optics for micro x-ray fluorescence analysis

Abstract

Practically achieved parameters of capillary optics are presented. A micro x-ray fluorescence (XRF) arrangement was realized by using a microfocus x-ray tube and a capillary optic. Several examples for application of micro XRF are given. It was shown that polycapillary lenses free of the “halo effect” well suited for micro XRF of heavy elements can be manufactured. Limits of opportunities for micro XRF applications and further development for micro XRF by using capillary optics are analyzed.