Thin Solid Films · 1985 · 26 citations · 22 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMaterials CharacterizationSpectroscopyMicrostructure AnalysisSemiconductor PhysicsSemiconductor SurfacesSilicon MaterialsSurface PhysicsEllipsometrySilicon MicrostructuresSpectroscopic Ellipsometry
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<i>Ellipsometry and Polarized Light</i>
R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations
Natural Sciences, Physics, Optics +13
Ellipsometry and Polarized Light
L. Cox · Optica Acta International Journal of Optics · 1978 · 1.9K citations
Optical properties of thin films
D. E. Aspnes · Thin Solid Films · 1982 · 1.6K citations