Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics - Concepedia

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Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics

44

Citations

17

References

2002

Year

G. Carlotti, P. Colpani, Domenico Piccolo, S. Santucci, V. Senez, G. Socino, L. Verdini

Thin Solid Films

Materials ScienceDielectricsDielectric FilmsEngineeringMicromechanicsMicrofabricationApplied PhysicsNano Electro Mechanical SystemViscoelastic PropertiesThin FilmsElectrical PropertyNanomechanicsMechanics Of MaterialsMicro-electromechanical SystemElectrical Insulation

References

	Year	Citations

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