Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target

Abstract

The energy distribution of negative oxygen (O-) ions and its spatial variation was measured in an RF magnetron plasma using a mass analyzer with an energy analyzer. O- ions with kinetic energies higher than 50 eV were observed during the sputtering of MgO. Spatial variation of the O- energy distribution was observed and was explained using a simple equivalent circuit model.