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Structural and electrical properties of radio frequency magnetron sputtered tantalum oxide films: Influence of post-deposition annealing

Materials ScienceMagnetismMaterials EngineeringPost-deposition AnnealingEngineeringMaterial AnalysisNanoelectronicsOxide ElectronicsTantalum Oxide FilmsApplied PhysicsRadio Frequency MagnetronThin FilmsEpitaxial GrowthThin Film Processing