Publication | Closed Access
Reactions of Silicon Carbide and Silicon(IV) Oxide at Elevated Temperatures
121
Citations
15
References
1992
Year
Materials ScienceMaterials EngineeringSio 2EngineeringSic‐o Stability DiagramApplied PhysicsSilicon CarbideVacuum MicrobalanceSemiconductor Device FabricationThermodynamicsChemistryStructural CeramicSilicon On InsulatorChemical KineticsCarbide
The reaction between SiC and SiO 2 has been studied in the temperature range 1400–1600 K. A Knudsen cell in conjunction with a vacuum microbalance and a high‐temperature mass spectrometer was used for this study. Two systems were studied—1:1 SiC (2 wt% excess carbon) and SiO 2 ; and 1:1:1 SiC, carbon, and SiO 2 . In both cases the excess carbon forms additional SiC within the Knudsen cell and adjusts to the direct reaction of stoichiometric SiC and SiO 2 to form SiO( g ) and CO( g ) in approximately a 3:1 ratio. These results are interpreted in terms of the SiC‐O stability diagram.
| Year | Citations | |
|---|---|---|
Page 1
Page 1