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Tailoring the pore-size distribution of high surface area microporous silicon imidonitrides by control of precursor composition

Materials ScienceEngineeringNanoporous MaterialMicrofabricationPrecursor CompositionSurface ScienceApplied PhysicsPore-size DistributionSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMicrofluidics