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Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fashionable craze?

MiniaturizationChemical Analysis SystemsEngineeringMicromachinesMicrofabricationFashionable CrazeMechanical EngineeringMicroscale SystemMicro-electromechanical SystemTechnologyMicroelectronicsMonocrystalline SiliconMicro TechnologyMicrostructureMicrofluidics