Development of centrally controlled synchrotron radiation lithography beamline system

Abstract

The centrally controlled beamline system for synchrotron radiation lithography has been investigated using the SORTEC storage ring(l GeV). From a practical standpoint, the recently built beamlines aim at attaining a centrally controlled beamline system, which is also serially interfaced with the storage ring. In operating the beamlines, not only local control, but also a central control notion is adopted. The central beamline control system comprises a beamline main computer and a programmable sequence controller (PSC) link. The local beamline control system consists of a PSC, a control panel, and a personal computer. The beamline main computer collects each beamline status datum through the PSC link, receiving the storage ring data from the main computer of the 1 GeV synchrotron radiation (SR) source. A novel oscillating mirror mechanism is proposed, in which the mirror chamber, driven by a combination of a cam mechanism and pulse motor installed in air, is oscillated to scan the mirror, thus producing high reliability and compact design. In addition, a practical beamline structure is offered which fulfills system vacuum protection and protects operators from radiation exposure.