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Pulsed laser-ablation deposition of thin films of molybdenum silicide and its properties as a conducting barrier for ferroelectric random-access memory technology

Materials ScienceEngineeringPhysicsApplied PhysicsLaser AblationLaser-ablation DepositionConducting BarrierThin Film Process TechnologyLaser-assisted DepositionThin FilmsPulsed Laser DepositionThin Film Processing