Japanese Journal of Applied Physics · 1983 · 23 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsNanomaterialsSemiconductor MaterialsScreen PrintingSemiconductor Device MaterialsSemiconductor Thin FilmsSubstrate PreparationThin-film DepositionCompound Semiconductor Substrate PreparationDigital Screen PrintingSubstrate Surface Preparation