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Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm

EngineeringSensorsMicrofabricationDetf Quartz ResonatorSilicon DiaphragmSensor DesignAcoustic SensorInstrumentationResonant Pressure SensorSensor TechnologyMicro-electromechanical SystemMicromachined Ultrasonic Transducer