Magnetron sputtering deposited AIN waveguides: effect of the structure on optical properties - Concepedia

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Magnetron sputtering deposited AIN waveguides: effect of the structure on optical properties

12

Citations

7

References

1990

Year

A. Cachard, R.Y. Fillit, I Kadad, J.‐C. POMMIER

PhotonicsOptical MaterialsEngineeringPhysicsWave OpticOptical PropertiesAin WaveguidesApplied PhysicsGuided-wave OpticOptoelectronicsPlanar Waveguide SensorElectro-optics Device

References

	Year	Citations

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