Publication | Closed Access
Study of surface/interface and bulk defect density in a-Si:H by means of photothermal deflection spectroscopy and photoconductivity
45
Citations
8
References
1987
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsDefect FormationSemiconductor MaterialSemiconductor Device FabricationPhotothermal Deflection SpectroscopySilicon On Insulator
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