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Rhenium deposition on a silicon surface at the room temperature for application in microsystems

Materials ScienceRoom TemperatureEngineeringMicrofabricationSurface ScienceApplied PhysicsSilicon SurfaceSemiconductor Device FabricationElectronic PackagingChemical DepositionMicroelectronicsChemical Vapor DepositionSilicon On InsulatorRhenium DepositionThin Film Processing