The effects of r.f. power and substrate temperature on the properties of ZnO films - Concepedia

Concepedia

Publication | Closed Access

The effects of r.f. power and substrate temperature on the properties of ZnO films

90

Citations

38

References

2003

Year

Su-Shia Lin, Jow-Lay Huang, Ding‐Fwu Lii

Surface and Coatings Technology

Materials EngineeringMaterials ScienceElectrical EngineeringMaterial AnalysisEngineeringNanoelectronicsOxide ElectronicsSubstrate TemperatureApplied PhysicsGallium OxideThin FilmsZno FilmsThin Film Processing

References

	Year	Citations

Page 1