Concepedia

The impact of cations on nucleus density during copper electrodeposition

Feng Qiao, Alan C. West

Electrochimica Acta · 2014 · 14 citations · 18 references

DOI

Concepts

References

18

Electrodeposition of copper: the nucleation mechanisms

Darko Grujičić, Batrić Pešić · Electrochimica Acta · 2002 · 698 citations

, , +11

Electrodeposition of Copper Thin Film on Ruthenium

Oliver Chyan, Tiruchirapalli Arunagiri, Thomas Ponnuswamy · Journal of The Electrochemical Society · 2003 · 237 citations

, , +17

On the influence of the nucleation overpotential on island growth in electrodeposition

Lian Guo, Peter C. Searson · Electrochimica Acta · 2010 · 164 citations

, , +14

Electrodeposition of Cu on Ru Barrier Layers for Damascene Processing

Thomas P. Moffat, Mitchell L. R. Walker, P. J. Chen et al. · Journal of The Electrochemical Society · 2005 · 115 citations · Full text

, , +17

Atomic Layer Deposition of Copper Seed Layers

Raj Solanki · Electrochemical and Solid-State Letters · 1999 · 111 citations

, , +17