Concepedia
Materials Science and Engineering A · 1991 · 66 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ProcessingThin FilmsChemical Vapor DepositionMaterial FilmPhysical Vapor DepositionThin-film DepositionCathodic Arc DepositionFilm DepositionFilm Formation
7
Titanium aluminum nitride films: A new alternative to TiN coatings
Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations
Natural Sciences, Materials Engineering, Materials Science +17
Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum Ambient
William D. Davis, H. Craig Miller · Journal of Applied Physics · 1969 · 544 citations
Engineering, Electrical Engineering, Physics +10
Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum
O. Knotek, W.‐D. Münz, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 307 citations
Comparison of cutting performance of ion-plated NbN, ZrN, TiN and (Ti, Al)N coatings
J. M. Molarius, Ari Korhonen, E. Harju et al. · Surface and Coatings Technology · 1987 · 95 citations
Engineering, Materials Engineering, Materials Science +14
TixAl1−xN films deposited by ion plating with an arc evaporator
H. Freller, H. Haessler · Thin Solid Films · 1987 · 77 citations
Natural Sciences, Materials Engineering, Materials Science +11