Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating system - Concepedia

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Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating system

113

Citations

30

References

2003

Year

In-Wook Park, Sung Ryong Choi, Ju Hyung Suh, Chan‐Gyung Park, Kwang Ho Kim

Thin Solid Films

Materials ScienceMaterials EngineeringMechanical EvaluationEngineeringMechanical EngineeringApplied PhysicsMaterials CharacterizationHybrid Coating SystemThin FilmsSuperhard Ti–al–si–nChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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