Characterization of charge-coupled device line and area-array imaging at low light levels

Abstract

A cell design affording compacting of an active CCD sensor, interline shift sensor, transfer gate and stopper diffusion into 2-mil centers with 5-m aluminum lines and spacings in a 75 × 100 element array will be described. Coherent readout technique removes Nyquist noise and suppresses clock feedthroughs.