Publication | Closed Access

Growth of cubic boron nitride films on Si by ion beam assisted deposition at the high temperatures

Materials ScienceCubic BoronBoron NitrideEngineeringHexagonal Boron NitrideCubic Boron NitrideApplied PhysicsHigh TemperaturesIon BeamThin FilmsEpitaxial GrowthChemical Vapor Deposition