Publication | Closed Access
AlN bulk single crystal growth on 6H-SiC substrates by sublimation method
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Citations
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References
2010
Year
Materials ScienceMaterials EngineeringAluminium Nitride6H-sic SubstratesEngineeringCrystal Growth TechnologySurface ScienceApplied PhysicsCarbideSemiconductor Device FabricationSublimation MethodChemical Vapor DepositionMicrostructure
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