Optimization of a buffer layer for cubic silicon carbide growth on silicon substrates - Concepedia

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Optimization of a buffer layer for cubic silicon carbide growth on silicon substrates

39

Citations

27

References

2013

Year

Matteo Bosi, G. Attolini, Mario Negri, C. Frigeri, E. Buffagni, C. Ferrari, Tiziano Rimoldi, Luigi Cristofolini, Lucrezia Aversa, Roberta Tatti,

Journal of Crystal Growth

Materials EngineeringElectrical EngineeringEngineeringNanoelectronicsBuffer LayerApplied PhysicsSilicon SubstratesSemiconductor Device FabricationMicroelectronicsChemical Vapor DepositionCarbide

References

	Year	Citations

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