Effect of beam voltage on the properties of aluminium nitride prepared by ion beam assisted deposition - Concepedia

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Effect of beam voltage on the properties of aluminium nitride prepared by ion beam assisted deposition

44

Citations

24

References

1996

Year

James H. Edgar, C.A. Carosella, Charles R. Eddy, Douglas T. Smith

Journal of Materials Science Materials in Electronics

Materials ScienceAluminium NitrideIon ImplantationEngineeringApplied PhysicsIon BeamLight MetalBeam VoltageMicrostructure

References

	Year	Citations

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