Argon plasma-assisted PDMS–LTCC bonding technique for microsystem applications

Abstract

A method for transparent polymer (polydimethylosiloxane, PDMS) to glass-covered low-temperature co-fired ceramics (LTCC) using microwave argon plasma is reported in this paper. Changes in the composition of both materials before and after plasma treatment are investigated with x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy-attenuated total reflection and contact angle measurements. The results obtained for PDMS and glass-covered LTCC modified with argon plasma are compared with previously reported results received for oxygen plasma. Moreover, a comparison of adhesion between PDMS and glass-covered LTCC bonded together using Ar and O2 plasma is made using a material testing machine.