Enhanced Mg Doping Efficiency in P-Type GaN by Indium-Surfactant-Assisted Delta Doping Method

Abstract

An indium-surfactant-assisted delta doping method is reported to enhance the hole concentration and doping efficiency of Mg-doped p-type GaN grown by metal organic chemical vapor deposition. The hole concentration is increased to 1.5×1018 cm-3 by using this method, which is 92% higher than that of conventional delta doping. This higher carrier concentration leads to an improved doping efficiency of 12%. Secondary ion mass spectroscopy reveals that the Mg incorporation is increased by the In surfactant. Photoluminescence analysis suggests that the nitrogen vacancies may be suppressed by the induced indium. Temperature-dependent Hall measurements indicate that the Mg ionization energy and compensation ratio are reduced by the In surfactant.