Journal of Micromechanics and Microengineering · 2010 · 75 citations · 30 references
EngineeringMaterials EngineeringMaterials ScienceActuatorsNanomaterialsNanotechnologyAtomic Force MicroscopyElectrostatic ActuationGraphene NanomaterialsNanomaterial CharacterizationNanomechanicsNanoscale MaterialsExfoliationFinite Element ModelingFinite Element SimulationGrapheneGraphene CharacterizationNanomechanical ResonatorsNanomechanical SensorsSilicon Dioxide
10.1088/0960-1317/20/11/115029
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