Precision Engineering · 1994 · 25 citations · 5 references
Materials ScienceEngineeringMicromechanicsMaterial ProcessingMicrofabricationMaterial MachiningMechanical EngineeringMicrocutting ProcessesProcessing And ManufacturingMechanics Of MaterialsMicrostructure
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Development of Ultra Precision Machine Tool Made of Ceramics
Yuji Furukawa, Nobuyuki MORONUKI, Katsutoshi Kitagawa et al. · CIRP Annals · 1986 · 30 citations
Machining High-Precision Mirrors Using Newly Developed CNC Machine
Katsunobu Ueda, Akira Amano, Koji Ogawa et al. · CIRP Annals · 1991 · 27 citations