BaSi2 and thin film alkaline earth silicides on silicon

Abstract

The epitaxial structural development and surface reactions of the alkaline earth metals with silicon have been studied as a function of surface coverage. The barium reaction has been characterized in detail from submonolayer structures to the thick film orthorhombic phase, BaSi2. From 0 to 1 monolayer a series of ordered surface structures develops that suggests a cubic Ba-Si compound. We have also shown that strontium, calcium, and magnesium develop these highly ordered submonolayer silicides. These submonolayer structures are the templates for the heteroepitaxial transition to alkaline earth containing oxides on silicon.