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Preparation and characterization of the defect–conductivity relationship of Ga-doped ZnO thin films deposited by nonreactive radio-frequency–magnetron sputtering

Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsApplied PhysicsGallium OxideThin Film Process TechnologyDefect–conductivity RelationshipThin FilmsNonreactive Radio-frequency–magnetron SputteringThin Film Processing