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The photolytic laser chemical vapor deposition rate of platinum, its dependence on wavelength, precursor vapor pressure, light intensity, and laser beam diameter

Materials ScienceAdvanced Laser ProcessingLight IntensityEngineeringLaser PhotochemistryOptical PropertiesApplied PhysicsLaser Beam DiameterLaser Processing TechnologyChemistryPrecursor Vapor PressurePulsed Laser DepositionLaser-assisted DepositionLaser Damage