TiN x films with metallic behavior at high N/Ti ratios for better solar control windows

Abstract

Using cathodic arc deposition with 700 eV nitrogen ion assistance, metallic response in TiNx thin films to at least N/Ti=1.3 is found. Metallic behavior is usually limited to N/Ti ratios just above 1.1. Defects are almost exclusively Ti vacancies which further enhances optical changes. The resulting large shift in onset of Drude reflection to longer wavelengths enhances the view, daylighting, and environmental performance of a coated window relative to stoichiometric TiN films on glass.