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Microprocessors get integrated sensors: Sensing devices and signal processing built into one silicon chip portend a new class of ‘smart’ sensors
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1980
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Smart SensorEngineeringDevice IntegrationSensor InterfaceIntegrated CircuitsSensor TechnologySensor NetworksSensing (Sensor Engineering)Smart SensorsSilicon ChipMicrofluidicsSilicon MicrosensorsElectrical EngineeringImplantable SensorComputer EngineeringMicroelectronicsSignal ProcessingSystem On ChipIntelligent SensorSensorsMicrofabricationNew ClassSame ChipSensor DesignTechnologyVarious Sensor Types
Considers the development of silicon microsensors which can fit on the same chip with a microprocessor. Various sensor types are described, their fabrication presented and their possible applications pointed to.