R.f. plasma-assisted chemical vapour deposition of diamond-like carbon: physical and mechanical properties

E.H.A. Dekempeneer, R. N. Jacobs, J. Smeets, J. Meneve, L. Eersels, Bart Blanpain, J.R. Roos, D. J. Oostra

Thin Solid Films · 1992 · 81 citations · 14 references

Concepts

References

14