Publication | Closed Access

R.f. plasma-assisted chemical vapour deposition of diamond-like carbon: physical and mechanical properties

Materials ScienceDiamond-like CarbonChemical EngineeringEngineeringCarbon-based MaterialMechanical PropertiesNanoelectronicsPlasma-assisted Chemical VapourApplied PhysicsGas Discharge PlasmaPlasma ProcessingChemical Vapor Deposition