Concepedia

R.f. plasma-assisted chemical vapour deposition of diamond-like carbon: physical and mechanical properties

E.H.A. Dekempeneer, R. N. Jacobs, J. Smeets, J. Meneve, L. Eersels, Bart Blanpain, J.R. Roos, D. J. Oostra

Thin Solid Films · 1992 · 81 citations · 14 references

DOI

Concepts

References

14

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

, , +17

Bonding in hydrogenated hard carbon studied by optical spectroscopy

B. Dischler, A. Bubenzer, P. Koidl · Solid State Communications · 1983 · 657 citations

, , +12

rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications

A. Bubenzer, B. Dischler, G. B. Brandt et al. · Journal of Applied Physics · 1983 · 500 citations

, , +17

Mechanical properties and coordinations of amorphous carbons

John Robertson · Physical Review Letters · 1992 · 253 citations

, , +15

Structure and physical properties of plasma-grown amorphous hydrogenated carbon films

P Couderc, Y. Catherine · Thin Solid Films · 1987 · 249 citations

, , +11