Surface processes in digital etching of GaAs - Concepedia

Concepedia

Publication | Closed Access

Surface processes in digital etching of GaAs

36

Citations

5

References

1993

Year

T. Meguro, Masashi Ishii, Koichi Kodama, Y. Yamamoto, K. Gamo, Y. Aoyagi

Thin Solid Films

SemiconductorsElectrical EngineeringEngineeringSurface ScienceApplied PhysicsDigital EtchingSemiconductor Device FabricationMicroelectronicsPlasma EtchingOptoelectronicsCompound Semiconductor

References

	Year	Citations

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