Applied Optics · 1973 · 14 citations · 0 references
EngineeringManufacturing EngineeringMaterials ScienceInstrumentationMaterials ProcessingOpticsCutting InstrumentsLaser CuttingLaser Surface ProcessingMachiningMask DesignMask FabricationFocused Ion Beam MachiningLaser PolishingLaser Surface PolishingMicro-polishingPolishing Processes
A technique is described for accurately polishing extremely small areas by ion machining. A graphite mask is prepared with a pulsed laser cutting tool. Prepared under computer control, this mask defines the contour of the cavity to be formed in a glass tube. Two methods for measuring final contour of the tube are described.